The radial line slot antenna plasma source is a high-density microwave plasma source comprising a high electron temperature source region within the plasma skin depth from a coupling window and low electron temperature diffusion region far from the window. The plasma is typically comprised of inert gases like argon and mixtures of halogen or fluorocarbon gases for etching. Simulations of the Plasma Structure of a Radial Line The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a … Radial Line Slot Antennas | SpringerLink
Radial Line Slot Antenna - Chiba U
A radial line slot antenna (RLSA) with a quasi-elliptical aperture to create an elliptical beam is discussed in this paper. A simple feeding structure consisting of a coaxial feeder and two parasitic pins is designed to produce the feed pattern required for uniform illumination over the aperture. ... RLSA - Radial-Line Slot Antenna | AcronymFinder How is Radial-Line Slot Antenna abbreviated? RLSA stands for Radial-Line Slot Antenna. Radial Line Slot Antenna in Ka-band for Space Uses Radial line slot antennas (RLSAs) are planar slot array antennas for circular polarization on oversized parallel plate radial waveguides. RLSA has been well known as a high gain, high efficiency antenna operating in high frequency ranges because of its low loss property of the waveguide. Plasma source using radial line slot antenna Temperature High-Density Plasma. Plasma source using radial line slot antenna.Radial Line Slot Antenna. (Invented by N. Goto in 1980). The first antenna which can control. near electromagnetic field. Plasma Properties.
US Patent for Plasma doping apparatus and plasma doping ...
Radioengineering - June 2016, Volume 25, Number 2 [DOI: 10… From this concepts, when all plasma elements are activated or switched to ON, the radiation signal from monopole antenna will trapped inside the plasma blanket and meanwhile when one or more plasma elements is deactivated (switched OFF … US6870517B1 - Configurable arrays for steerable antennas and… The reconfigurable array is combined with a transmitting antenna to make a steerable antenna. The reconfigurable array surrounds the transmitting antenna and reflects all transmissions except on selected radials where apertures in the … US7276990B2 - Single-pole multi-throw switch having low… No. 6,252,473 issued Jun. 26, 2001 and assigned to Hughes Electronics Corporation. This patent describes a waveguide switch using bulk mechanical actuators.
A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure.
Radial Line Slot Antenna Design for Monopulse Space Debris Radar radial line slot antenna for this application. Previous studies were presented in [2]. In that paper, the idea of the monopulse antenna was implemented at Ku band. However, there was not an optimization process of the slot (position and length). This paper shows the optimization process for the slot arrangement Design Method, Analysis and Prototypes of Radial Line Slot ... II. Radial Line Slot Antenna Structure Figure 1 shows the structure of the antenna. A Radial Line Slot Antenna is formed by a parallel plate structure, whose height is less than half a wavelength to avoid the propagation of upper modes. A radial TEM mode is generated through a coaxial probe (or several probes). Radial Microstrip Slotline Feed Network for Circular Mobile ...
Design of Radial Line Slot Antennas at 8.3 GHz for Large ... - IOPscience
An electrically small broadband antenna comprises a plurality generalized contrawound toroidal helical antenna elements, each made from a single continuous conductor divided into two length portions each of which are substantially the same … US8284102B2 - Displaced feed parallel plate antenna - Google… A displaced feed antenna which has a spaced conducting plate construction that incorporates electronically selectable feed points with associated antenna beam positions, and which comprises (i) a set of one or more beamforming … US3872349A - Apparatus and method for generating radiation… A microwave generated plasma light source of arbitrary length comprising means for generating microwave energy, means for coupling said generated microwave energy to a discharge unit, said discharge unit comprising a longitudinally …
Computational modeling study of the radial line slot antenna ... Request PDF on ResearchGate | Computational modeling study of the radial line slot antenna microwave plasma source with comparisons to experiments | The radial line slot antenna plasma source is a ... Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure. US6388632B1 - Slot antenna used for plasma surface processing ... As is well known, a typical radial line slot antenna utilized in a plasma surface processing apparatus is provided with a metal antenna guide (made of e.g. aluminum) and a disklike dielectric member (made of e.g. quartz or alumina ceramic) supported by the antenna guide. Radial line slot antenna having a conductive layer - Tokyo ...